Concepedia

Olaf Fortagne

OF

Statistics

Publications

3

Citations

73

H-Index

3

Active since

1996

Affiliations

Vistec Electron Beam (Germany)(Current)

Olaf Fortagne is an author at Vistec Electron Beam (Germany) specializing in engineering, mask fabrication, and microfabrication.

Publications per year

1996–2007

3

Publications

3

Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications

Ivo W. Rangelow, Tzv. Ivanov, K. Ivanova et al. · Microelectronic Engineering · 2007 · 49 citations

, , +14

A special method to create gratings of variable line density by low voltage electron beam lithography

B. Niemann, Thomas Wilhein, T. Schliebe et al. · Microelectronic Engineering · 1996 · 14 citations

, , +9

Fabrication of step and flash imprint lithography templates using a variable shaped-beam exposure tool

William J. Dauksher, David P. Mancini, Kevin J. Nordquist et al. · Microelectronic Engineering · 2004 · 10 citations

, , +9

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