Concepedia

Erik Novak

EN

9

Publications

201

Citations

9

H-Index

1997

Active since

Affiliations

Veeco (United States)(Current)

Erik Novak is an author at Veeco (United States) specializing in measurement, engineering, and education.

Top concepts

EngineeringMeasurementEducationCalibrationInstrumentationInterferometryMicrofabricationMicroscopyMicroelectronicsMechanical Engineering

Publications per year

1997–2014

9

Publications

9

Performance advances in interferometric optical profilers for imaging and testing

Joanna Schmit, Jason Reed, Erik Novak et al. · Journal of Optics A Pure and Applied Optics · 2008 · 53 citations

TSOM method for semiconductor metrology

Ravikiran Attota, Ronald G. Dixson, John A. Kramar et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 34 citations

Tsom Method, Engineering, Measurement +28

MEMS metrology techniques

Erik Novak · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 27 citations

Engineering, Measurement, Microscopy +21

<title>Transfer function characterization of laser Fizeau interferometer for high-spatial-frequency phase measurements</title>

Erik Novak, Chiayu Ai, James C. Wyant · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 23 citations

Engineering, Measurement, Optical Testing +20

Dynamic MEMS measurement using a strobed interferometric system with combined coherence sensing and phase information

Erik Novak, Der-Shen Wan, P. Unruh et al. · 2004 · 17 citations

Engineering, Sensor Array, Measurement +22

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