Markku Tilli

A 3D micromechanical compass

Jukka Kyynäräinen, Jaakko Saarilahti, H. Kattelus et al. · Sensors and Actuators A Physical · 2007 · 87 citations

Engineering, Mechanical Engineering, Robotics Engineering +8

Chemically Stable Atomic-Layer-Deposited Al₂O₃ Films for Processability

Mikael Broas, Olli Kanninen, Vesa Vuorinen et al. · ACS Omega · 2017 · 79 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Effect of Chemicals on Metal Contamination on Silicon Wafers

Olli Anttila, Markku Tilli, Marc Schaekers et al. · Journal of The Electrochemical Society · 1992 · 32 citations

Natural Sciences, Chemistry, Materials Science +15

Metal Contamination Removal on Silicon Wafers using Dilute Acidic Solutions

Olli Anttila, Markku Tilli · Journal of The Electrochemical Society · 1992 · 26 citations

Natural Sciences, Chemistry, Materials Science +13

Quasi-lifetime topography of magnetic domain movements in grain oriented (100) [001] Fe−3 wt% Si Polycrystals Using White Synchrotron Radiation. The influence of an external magnetic field

J. D. Stephenson, Väinö Kelhä, Markku Tilli et al. · physica status solidi (a) · 1979 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +17