Concepedia

Markku Tilli

MT

Statistics

Publications

12

Citations

320

H-Index

11

Active since

1979

Affiliations

Okmetic (Finland)(Current)

VTT Technical Research Centre of Finland

Aalto University

Markku Tilli is an author at Okmetic (Finland) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsIntegrated CircuitsMicroelectronicsMicrofabricationCrystalline DefectsElectronic PackagingElectrical EngineeringPhysics

Publications per year

1979–2017

12

Publications

12

A 3D micromechanical compass

Jukka Kyynäräinen, Jaakko Saarilahti, H. Kattelus et al. · Sensors and Actuators A Physical · 2007 · 87 citations

Geometric Modeling, Robot Kinematics, Engineering +10

Chemically Stable Atomic-Layer-Deposited Al<sub>2</sub>O<sub>3</sub> Films for Processability

Mikael Broas, Olli Kanninen, Vesa Vuorinen et al. · ACS Omega · 2017 · 73 citations · Full text

Effect of Chemicals on Metal Contamination on Silicon Wafers

Olli Anttila, Markku Tilli, Marc Schaekers et al. · Journal of The Electrochemical Society · 1992 · 32 citations

Materials Science, Various Suppliers, Chemical Engineering +15

Metal Contamination Removal on Silicon Wafers using Dilute Acidic Solutions

Olli Anttila, Markku Tilli · Journal of The Electrochemical Society · 1992 · 26 citations

Water Solutions, Extractive Metallurgy, Chemical Engineering +14

Quasi-lifetime topography of magnetic domain movements in grain oriented (100) [001] Fe−3 wt% Si Polycrystals Using White Synchrotron Radiation. The influence of an external magnetic field

J. D. Stephenson, Väinö Kelhä, Markku Tilli et al. · physica status solidi (a) · 1979 · 17 citations

Magnetic Properties, Intermediate Thickness, Engineering +22

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