Concepedia

Mikael Broas

MB

10

Publications

294

Citations

10

H-Index

2012

Active since

Affiliations

Aalto University(Current)

University of Jyväskylä

Fraunhofer Institute for Microstructure of Materials and Systems

Mikael Broas is an author at Aalto University specializing in engineering, applied physics, and mechanical engineering.

ORCID

Top concepts

Publications per year

2012–2018

10

Publications

10

Chemically Stable Atomic-Layer-Deposited Al<sub>2</sub>O<sub>3</sub> Films for Processability

Mikael Broas, Olli Kanninen, Vesa Vuorinen et al. · ACS Omega · 2017 · 73 citations · Full text

Shock Impact Reliability and Failure Analysis of a Three-Axis MEMS Gyroscope

Jue Li, Mikael Broas, Joonas Makkonen et al. · Journal of Microelectromechanical Systems · 2013 · 51 citations

, , +21

Corrosion protection of steel with multilayer coatings: Improving the sealing properties of physical vapor deposition CrN coatings with Al 2 O 3 /TiO 2 atomic layer deposition nanolaminates

Jarmo Leppäniemi, Perttu Sippola, Mikael Broas et al. · Thin Solid Films · 2017 · 44 citations · Full text

, , +10

Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films

Mikael Broas, Perttu Sippola, Timo Sajavaara et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 27 citations · Full text

, , +12

Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

Ville Rontu, Perttu Sippola, Mikael Broas et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 26 citations · Full text

, , +11

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