Franck Salvan

Silicon roughness induced by plasma etching

R. Petri, Pascal Brault, O. Vatel et al. · Journal of Applied Physics · 1994 · 106 citations

Natural Sciences, Materials Science, Physics +15

Quantitative Microroughness Analysis down to the Nanometer Scale

Philippe Dumas, B Bouffakhreddine, Claude Amra et al. · Europhysics Letters (EPL) · 1993 · 98 citations

Natural Sciences, Materials Science, Physics +17

Roughness scaling of plasma-etched silicon surfaces

Pascal Brault, Philippe Dumas, Franck Salvan · Journal of Physics Condensed Matter · 1998 · 36 citations

Engineering, Materials Engineering, Materials Science +17

Roughness Assessment of Polysilicon Using Power Spectral Density

O. Vatel, Philippe Dumas, Frederic Chollet et al. · Japanese Journal of Applied Physics · 1993 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17

Structure of Si(111) surfaces etched in 40% NH4F: Influence of the doping

Jason Roche, Michel Ramonda, F. Thibaudau et al. · Microscopy Microanalysis Microstructures · 1994 · 13 citations · Full text

Natural Sciences, Chemistry, Materials Science +14