Concepedia
Statistics
Publications
5
Citations
92
H-Index
Active since
2006
Affiliations
Applied Materials (Israel)(Current)
National Institute of Standards and Technology
University at Albany, State University of New York
Ram Peltinov is an author at Applied Materials (Israel) specializing in semiconductor devices, electrical engineering, and engineering.
Publications per year
2006–2010
Phenomenology of electron-beam-induced photoresist shrinkage trends
Benjamin Bunday, Aaron Cordes, John A. Allgair et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 24 citations · Full text
Engineering, Electrical Engineering, Materials Science +17
Characterization of CD-SEM metrology for iArF photoresist materials
Benjamin Bunday, Aaron Cordes, Ndubuisi G. Orji et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 23 citations
Engineering, Electrical Engineering, Materials Engineering +13
Electron-beam induced photoresist shrinkage influence on 2D profiles
Benjamin Bunday, Aaron Cordes, John A. Allgair et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 21 citations · Full text
The coming of age of tilt CD-SEM
Benjamin Bunday, John A. Allgair, Eric Solecky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 14 citations
Engineering, Electrical Engineering, Metrology +15
Bias reduction in roughness measurement through SEM noise removal
R. Katz, CHRISTINA CHASE, Roman Kris et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 10 citations
Engineering, Computer Engineering, Biomedical Imaging +16
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