Kazuo Kohmura - Concepedia

Author

Kazuo Kohmura

National Institute of Advanced Industrial Science and Technology

Also Known As

Daniel Jang, K. Kohmura, Kazuo Kohmura

Publications

376

Citations

H-Index

Concepts

All Affiliations

National Institute of Advanced Industrial Science and Technology Hiroshima University Association of Super-Advanced Electronics Mitsui Chemicals (Japan)

About

Kazuo Kohmura is an author at National Institute of Advanced Industrial Science and Technology specializing in engineering, materials science, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	10	10	258
2	Applied Physics	9	9	183
3	Chemical Engineering	4	4	94
4	Chemistry	2	2	92
5	Electrical Engineering	2	2	39

Kazuo Kohmura

Publications

258

Citations

H-Index

Page 1

	Year	Citations
Dissolution of Zeolite in Acidic and Alkaline Aqueous Solutions As Revealed by AFM Imaging Sadaaki Yamamoto, Shoko Sugiyama, Osamu Matsuoka, The Journal of Physical Chemistry Materials ScienceAtomic Force MicroscopyMolecular SieveEngineeringSurface Science	1996	75
Effect of moisture adsorption on the properties of porous-silica ultralow-k films Y. Uchida, S. Hishiya, Nobutoshi Fujii, Microelectronic Engineering Materials ScienceChemical EngineeringEngineeringNanoporous MaterialNanomaterials	2006	38
Novel organosiloxane vapor annealing process for improving properties of porous low-k films Kazuo Kohmura, Hirofumi Tanaka, Shunsuke Oike, Thin Solid Films Materials EngineeringMaterials ScienceNovel Organosiloxane VaporEngineeringNanoporous Material	2006	29
Influence of Humidity on Electrical Characteristics of Self-Assembled Porous Silica Low-k Films Takamaro Kikkawa, Shin-Ichiro Kuroki, Susumu Sakamoto, Journal of The Electrochemical Society EngineeringNanoporous MaterialPorous MembraneSurface Coverage MoleculeHumidity Sensor	2005	27
Carbon loss induced by plasma beam irradiation in porous silica films Kazuaki Kurihara, Tetsuo Ono, Kazuo Kohmura, Journal of Applied Physics Materials SciencePorous Silica FilmsChemical EngineeringMethyl GroupPlasma Beam Irradiation	2007	17
Theoretical Investigation of Dielectric Constant and Elastic Modulus of Three-Dimensional Isotropic Porous Silica Films with Cubic and Disordered Pore Arrangements Hidenori Miyoshi, Kazuhiro Yamada, Kazuo Kohmura, Japanese Journal of Applied Physics EngineeringNanoporous MaterialMechanical EngineeringPorous Silica FilmSoft Matter	2005	16
Young’s modulus evaluation by SAWs for porous silica low-k film with cesium doping Xia Xiao, Xing Shan, Yasuhisa Kayaba, Microelectronic Engineering Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringCesium Doping	2010	16
A Novel Organosiloxane Vapor Annealing Process for Improving Elastic Modulus of Porous Low-k Films Kazuo Kohmura, Shunsuke Oike, Masami Murakami, MRS Proceedings Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringNanoporous Material	2004	16
32 nm node Ultralow-k(k=2.1)/Cu Damascene Multilevel Interconnect using High-Porosity (50 %) High-Modulus (9 GPa) Self-Assembled Porous Silica Shinichi Chikaki, Kentaro Kinoshita, Tadachika Nakayama, EngineeringNanoporous MaterialMaterial InnovationSilicon On InsulatorDamascene Multilevel Interconnect	2007	12
Effect of Water Adsorption on Electrical Characteristics of Porous Silica Films Yasuhisa Kayaba, Kazuo Kohmura, Takamaro Kikkawa Japanese Journal of Applied Physics Porous Silica FilmsEngineeringNanoporous MaterialPorous MembraneRelative Humidity	2008	12

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