Novel stacked CMOS image sensor with advanced Cu2Cu hybrid bonding

Y. Kagawa, Nobutoshi Fujii, Kenichi Aoyagi, +15

Electrical EngineeringNew CisEngineeringDevice IntegrationAdvanced Cu2cu Hybrid +6

High-definition Visible-SWIR InGaAs Image Sensor using Cu-Cu Bonding of III-V to Silicon Wafer

Shuji Manda, Ryusaku Matsumoto, Suguru Saito, +9

Short Wavelength OpticOptical MaterialsEngineeringCu-cu BondingSilicon Readout +17

An Advanced CuCu Hybrid Bonding For Novel Stacked CMOS Image Sensor

Y. Kagawa, Nobutoshi Fujii, Kenichi Aoyagi, +14

Electrical EngineeringNew CisEngineeringDevice IntegrationAdvanced Packaging (Semiconductors) +7

Influence of CMP Chemicals on the Properties of Porous Silica Low-k Films

Akira Ishikawa, Yoshinori Shishida, T. Yamanishi, +7

Journal of The Electrochemical Society

EngineeringNanoporous MaterialPorous MembraneChemistryChemical Engineering +15

Effect of moisture adsorption on the properties of porous-silica ultralow-k films

Y. Uchida, S. Hishiya, Nobutoshi Fujii, +4

Microelectronic Engineering

Materials ScienceChemical EngineeringEngineeringNanoporous MaterialNanomaterials +8

Novel organosiloxane vapor annealing process for improving properties of porous low-k films

Kazuo Kohmura, Hirofumi Tanaka, Shunsuke Oike, +6

Thin Solid Films

Materials EngineeringMaterials ScienceNovel Organosiloxane VaporEngineeringNanoporous Material +7

Impacts of Misalignment on 1μm Pitch Cu-Cu Hybrid Bonding

Y. Kagawa, H. Hashiguchi, Takumi Kamibayashi, +5

Materials ScienceMaterials EngineeringElectrical EngineeringElectromigration TechniqueUpper Cu Pad +11

Skeletal silica characterization in porous-silica low-dielectric-constant films by infrared spectroscopic ellipsometry

Syozo Takada, Nobuhiro Hata, Yutaka Seino, +2

Journal of Applied Physics

Infrared Spectroscopic EllipsometryOptical MaterialsEngineeringNanoporous MaterialSkeletal Silica Characterization +20

Comparative Studies of Ultra Low-κ Porous Silica Films with 2-D Hexagonal and Disordered Pore Structures

Nobutoshi Fujii, Kazuhiro Yamada, Yoshiaki Oku, +4

MRS Proceedings

Materials ScienceMaterials EngineeringDisordered Pore StructuresPore StructureEngineering +9

Dependences of Young’s modulus of porous silica low dielectric constant films on skeletal structure and porosity

Syozo Takada, Nobuhiro Hata, Yutaka Seino, +2

Journal of Applied Physics

Porous Silica FilmsOptical MaterialsEngineeringAcidic Silica SolChemistry +18