Concepedia

Publication | Closed Access

Effect of moisture adsorption on the properties of porous-silica ultralow-k films

DOI

38

Citations

7

References

2006

Year

Y. Uchida, S. Hishiya, Nobutoshi Fujii, Kazuo Kohmura, Tadachika Nakayama, Hirofumi Tanaka, Takamaro Kikkawa
Microelectronic Engineering

References

YearCitations

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