Concepedia

Publication | Closed Access

Novel organosiloxane vapor annealing process for improving properties of porous low-k films

DOI

29

Citations

11

References

2006

Year

Kazuo Kohmura, Hirofumi Tanaka, Shunsuke Oike, Masami Murakami, Nobutoshi Fujii, S. Takada, Tetsuo Ono, Yutaka Seino, Takamaro Kikkawa
Thin Solid Films

References

YearCitations

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