Concepedia

G. Gibson

GG

2

Publications

129

Citations

2

H-Index

1994

Active since

Affiliations

AT&T (United States)(Current)

G. Gibson is an author at AT&T (United States) specializing in plasma science, natural sciences, and applied physics.

Top concepts

Publications per year

1994–1997

2

Publications

2

Characterization of an azimuthally symmetric helicon wave high density plasma source

George Tynan, Andrew D. Bailey, G.A. Campbell et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 111 citations

, , +12

Comparison of advanced plasma sources for etching applications. III. Ion energy distribution functions for a helicon and a multipole electron cyclotron resonance source

G. Gibson, Herbert H. Sawin, I. Tepermeister et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 18 citations

, , +20

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