Long Wen

Study on the electrical, optical, structural, and morphological properties of highly transparent and conductive AZO thin films prepared near room temperature

Long Wen, Bibhuti B. Sahu, Hye R. Kim et al. · Applied Surface Science · 2018 · 54 citations

Materials Science, Room Temperature, Morphological Properties +10

Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films

Long Wen, Manish Kumar, Bibhuti B. Sahu et al. · Surface and Coatings Technology · 2015 · 43 citations

Materials Science, Optical Materials, Engineering +8

Investigation of SiO2 Etch Characteristics by C6F6/Ar/O2 Plasmas Generated Using Inductively Coupled Plasma and Capacitively Coupled Plasma

Dain Sung, Long Wen, Hyunwoo Tak et al. · Materials · 2022 · 34 citations · Full text

Effect of hydrofluorocarbon structure of C3H2F6 isomers on high aspect ratio etching of silicon oxide

Hyun Woo Tak, Hye Joo Lee, Long Wen et al. · Applied Surface Science · 2022 · 30 citations

Materials Engineering, Materials Science, Engineering +10

Effect of different pulse modes during Cl2/Ar inductively coupled plasma etching on the characteristics of nanoscale silicon trench formation

Hee‐Ju Kim, Long Wen, Doo San Kim et al. · Applied Surface Science · 2022 · 22 citations

Electrical Engineering, Engineering, Microfabrication +9