Concepedia

Hye Joo Lee

HJ

2

Publications

53

Citations

2

H-Index

2022

Active since

Affiliations

Sungkyunkwan University(Current)

Hye Joo Lee is an author at Sungkyunkwan University specializing in applied physics, materials science, and materials engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicrofabricationMaterials EngineeringMicroelectronics

Publications per year

2022–2023

2

Publications

2

Effect of hydrofluorocarbon structure of C3H2F6 isomers on high aspect ratio etching of silicon oxide

Hyun Woo Tak, Hye Joo Lee, Long Wen et al. · Applied Surface Science · 2022 · 30 citations

Materials Engineering, Materials Science, Engineering +10

Characteristics of high aspect ratio SiO2 etching using C4H2F6 isomers

Hye Joo Lee, Hyun Woo Tak, Seong Bae Kim et al. · Applied Surface Science · 2023 · 23 citations

Materials Science, Materials Engineering, Wafer Scale Processing +10

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