Concepedia

Chiyan Kuan

CK

4

Publications

50

Citations

4

H-Index

2011

Active since

Affiliations

Hermes Microvision (United States)(Current)

Dai Nippon Printing (Japan)

Chiyan Kuan is an author at Hermes Microvision (United States) specializing in electrical engineering, nanoelectronics, and instrumentation.

Top concepts

Publications per year

2011–2020

4

Publications

4

Demonstration of defect free EUV mask for 22nm NAND flash contact layer using electron beam inspection system

T. Shimomura, Satoshi Kawashima, Yuichi Inazuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 17 citations

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Multi-beam Inspection (MBI) development progress and applications

Eric Long, Weiming Ren, Xinan Luo et al. · 2020 · 12 citations

Electron beam inspection of 16nm HP node EUV masks

T. Shimomura, Shogo Narukawa, Tsukasa Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 11 citations

EUV mask and wafer defectivity: strategy and evaluation for full die defect inspection

Ravi Bonam, Hung-Yu Tien, Acer Chou et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 10 citations

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