Concepedia

Yuichi Inazuki

YI

3

Publications

39

Citations

3

H-Index

2008

Active since

Affiliations

Dai Nippon Printing (Japan)(Current)

Yuichi Inazuki is an author at Dai Nippon Printing (Japan) specializing in optoelectronics, microelectronics, and electronic packaging.

Top concepts

Publications per year

2008–2011

3

Publications

3

Demonstration of defect free EUV mask for 22nm NAND flash contact layer using electron beam inspection system

T. Shimomura, Satoshi Kawashima, Yuichi Inazuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 17 citations

, , +17

Short-range electron backscattering from EUV masks

Hiroyoshi Tanabe, Tsukasa Abe, Yuichi Inazuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

Decomposition difficulty analysis for double patterning and the impact on photomask manufacturability

Yuichi Inazuki, Nobuhito Toyama, Takaharu Nagai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations

, , +20

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