Concepedia
1
Publications
10
Citations
H-Index
2016
Active since
Affiliations
IBM (United States)(Current)
Hung-Yu Tien is an author at IBM (United States).
Publications per year
2016–2016
EUV mask and wafer defectivity: strategy and evaluation for full die defect inspection
Ravi Bonam, Hung-Yu Tien, Acer Chou et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 10 citations
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