Concepedia
1
Publications
11
Citations
H-Index
2012
Active since
Affiliations
Hermes Microvision (United States)(Current)
Shogo Narukawa is an author at Hermes Microvision (United States).
Publications per year
2012–2012
Electron beam inspection of 16nm HP node EUV masks
T. Shimomura, Shogo Narukawa, Tsukasa Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 11 citations
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