Concepedia
Statistics
Publications
3
Citations
235
H-Index
Active since
2005
Affiliations
CEA Grenoble(Current)
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Université Grenoble Alpes
Laboratoire d'Électronique des Technologies de l'Information
Institut polytechnique de Grenoble
T. Morel is an author at CEA Grenoble specializing in semiconductor devices, engineering, and materials science.
Publications per year
2005–2010
Investigations of titanium nitride as metal gate material, elaborated by metal organic atomic layer deposition using TDMAT and NH3
F. Fillot, T. Morel, S. Minoret et al. · Microelectronic Engineering · 2005 · 121 citations
Engineering, Materials Engineering, Materials Science +15
Low leakage and low variability Ultra-Thin Body and Buried Oxide (UT2B) SOI technology for 20nm low power CMOS and beyond
F. Andrieu, O. Weber, J. Mazurier et al. · 2010 · 103 citations
Engineering, Computer Engineering, Electrical Engineering +17
Alkoxysilane Layers Compatible with Copper Deposition for Advanced Semiconductor Device Applications
Diane Rébiscoul, V. Perrut, T. Morel et al. · Langmuir · 2010 · 11 citations
Natural Sciences, Materials Engineering, Materials Science +17
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