Concepedia

V. Perrut

VP

4

Publications

66

Citations

4

H-Index

2008

Active since

Affiliations

CEA Grenoble(Current)

Institut polytechnique de Grenoble

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Laboratoire d'Électronique des Technologies de l'Information

Université Grenoble Alpes

V. Perrut is an author at CEA Grenoble specializing in engineering, materials science, and chemical engineering.

Top concepts

EngineeringMaterial ScienceChemistryApplied PhysicsSurface ScienceChemical EngineeringCorrosionThin FilmsRefrigerationFood Engineering

Publications per year

2008–2017

4

Publications

4

Copper cleaning in supercritical CO2 for the microprocessor interconnects

Caroline Ventosa, Diane Rébiscoul, V. Perrut et al. · Microelectronic Engineering · 2008 · 24 citations

Materials Science, Copper Cleaning, Chemical Engineering +6

Alkoxysilane layers deposited by SC CO2 process on silicon oxide for microelectronics applications

Diane Rébiscoul, V. Perrut, O. Renault et al. · The Journal of Supercritical Fluids · 2009 · 19 citations

Materials Science, Sc Co2 Process, Alkoxysilane Layers +9

Towards ingredients by combining Supercritical Fluids with other processes

M. Perrut, V. Perrut · The Journal of Supercritical Fluids · 2017 · 12 citations

Towards Ingredients, Supercritical Fluid Chromatography, Supercritical Water +4

Alkoxysilane Layers Compatible with Copper Deposition for Advanced Semiconductor Device Applications

Diane Rébiscoul, V. Perrut, T. Morel et al. · Langmuir · 2010 · 11 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Rows per page

1–4 of 4