Caroline Ventosa

Publications

276

Citations

H-Index

2008

Active since

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

Institut polytechnique de Grenoble

Laboratoire d'Électronique des Technologies de l'Information

CEA Grenoble

Université Grenoble Alpes

Caroline Ventosa is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceMicroelectronicsElectronic PackagingMaterials EngineeringPhysicsCorrosionRefrigeration

Publications per year

2008–2010

Publications

Hydrophilic low-temperature direct wafer bonding

Caroline Ventosa, F. Rieutord, L. Libralesso et al. · Journal of Applied Physics · 2008 · 103 citations

Materials Engineering, Materials Science, Wafer Scale Processing +12

Physics of direct bonding: Applications to 3D heterogeneous or monolithic integration

Pierric Gueguen, Caroline Ventosa, L. Di Cioccio et al. · Microelectronic Engineering · 2009 · 52 citations

Materials Science, 3D Ic Architecture, Engineering +14

Mechanism of Thermal Silicon Oxide Direct Wafer Bonding

Caroline Ventosa, Christophe Morales, L. Libralesso et al. · Electrochemical and Solid-State Letters · 2009 · 51 citations

Copper cleaning in supercritical CO2 for the microprocessor interconnects

Caroline Ventosa, Diane Rébiscoul, V. Perrut et al. · Microelectronic Engineering · 2008 · 24 citations

Materials Science, Copper Cleaning, Chemical Engineering +6

Low Temperature Wafer Bonding

Frank Fournel, H. Moriceau, Caroline Ventosa et al. · ECS Transactions · 2008 · 19 citations

Materials Science, Materials Engineering, Electrical Engineering +15

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