Ki-Seon Kim

A novel doping technology for ultra-shallow junction fabrication: boron diffusion from boron-adsorbed layer by rapid thermal annealing

Ki-Seon Kim, Yun‐Heub Song, Ki-Tae Park et al. · Thin Solid Films · 2000 · 21 citations

Engineering, Materials Engineering, Materials Science +17

Real-time monitoring of the Si carbonization process by a combined method of reflection high-energy electron diffraction and Auger electron spectroscopy

Ryoji Kosugi, Yuji Takakuwa, Ki-Seon Kim et al. · Applied Physics Letters · 1999 · 21 citations

Engineering, Materials Engineering, Materials Science +17

RHEED-AES observation of Sb surface segregation during Sb-mediated Si MBE on Si(001)

Ki-Seon Kim, Yuji Takakuwa, T. Abukawa et al. · Journal of Crystal Growth · 1998 · 17 citations

Engineering, Materials Engineering, Materials Science +14