Concepedia

RHEED-AES observation of Sb surface segregation during Sb-mediated Si MBE on Si(001)

Ki-Seon Kim, Yuji Takakuwa, T. Abukawa, Shozo Kono

Journal of Crystal Growth · 1998 · 17 citations · 0 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ChemistrySurface ScienceSemiconductor InterfacesSemiconductor PhysicsSemiconductor SurfacesSilicon MaterialsSurface PhysicsReaction-induced Surface SegregationSilicon ChemistrySilicon InterfacesSilicon Surface ScienceSurface SegregationSurface-based Segregation