Russell G. DeAnna

Fabrication and characterization of polycrystalline SiC resonators

Shuvo Roy, Russell G. DeAnna, Christian A. Zorman et al. · IEEE Transactions on Electron Devices · 2002 · 62 citations

Engineering, Materials Engineering, Materials Science +17

Smart ice detection systems based on resonant piezoelectric transducers

Shuvo Roy, Alain Izad, Russell G. DeAnna et al. · Sensors and Actuators A Physical · 1998 · 51 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

The mechanical properties of polycrystalline 3C-SiC films grown on polysilicon substrates by atmospheric pressure chemical-vapor deposition

Shuvo Roy, Christian A. Zorman, Mehran Mehregany et al. · Journal of Applied Physics · 2006 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers

N. Rajan, Christian A. Zorman, Mehran Mehregany et al. · Surface and Coatings Technology · 1998 · 27 citations

Engineering, Electrical Engineering, Materials Science +14

Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers

N. Rajan, Christian A. Zorman, Mehran Mehregany et al. · Thin Solid Films · 1998 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +16