Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers - Concepedia

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Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers

19

Citations

6

References

1998

Year

N. Rajan, Christian A. Zorman, Mehran Mehregany, Russell G. DeAnna, R.J. Harvey

Thin Solid Films

Materials ScienceEngineeringMicrofabricationApplied Physics3C-sic Thin FilmsProtective CoatingsThin FilmsMicroelectronicsChemical Vapor DepositionThin Film ProcessingCarbideSilicon-micromachined Atomizers

References

	Year	Citations

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