Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers - Concepedia

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Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers

27

Citations

4

References

1998

Year

N. Rajan, Christian A. Zorman, Mehran Mehregany, Russell G. DeAnna, R.J. Harvey

Surface and Coatings Technology

Materials ScienceEngineeringErosion ResistanceMicromachinesMicrofabricationSurface ScienceApplied PhysicsMicro-electromechanical SystemMicroelectronicsThin Film ProcessingMicrostructure

References

	Year	Citations

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