Statistics
Publications
4
Citations
154
H-Index
4
Active since
1999
P. Leerungnawarat is an author at University of Florida specializing in etching processes, materials science, and semiconductor device materials.
Publications per year
1999–2001
4
4
Ultradeep, low-damage dry etching of SiC
H. Cho, P. Leerungnawarat, David C. Hays et al. · Applied Physics Letters · 2000 · 60 citations
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