Gianluca Panici

<i>In situ</i> collector cleaning and extreme ultraviolet reflectivity restoration by hydrogen plasma for extreme ultraviolet sources

Daniel T. Elg, J. Sporre, Gianluca Panici et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 37 citations

Ultraviolet Light, Engineering, Plasma Physics +20

Removal of Tin from Extreme Ultraviolet Collector Optics by In-Situ Hydrogen Plasma Etching

Daniel T. Elg, Gianluca Panici, Sumeng Liu et al. · Plasma Chemistry and Plasma Processing · 2017 · 29 citations

Chemical Engineering, Optical Materials, Engineering +7

Study of a linear surface wave plasma source for tin removal in an extreme ultraviolet source

Dren Qerimi, Gianluca Panici, Arihant Jain et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2020 · 15 citations · Full text

Ultraviolet Light, Engineering, Multilayer Mirror +20

Tin removal by an annular surface wave plasma antenna in an extreme ultraviolet lithography source

Dren Qerimi, Andrew C. Herschberg, Gianluca Panici et al. · Journal of Applied Physics · 2022 · 12 citations · Full text

Engineering, Plasma Physics, Plasma Densities +17

High deposition rate nanocrystalline and amorphous silicon thin film production via surface wave plasma source

J. Peck, Piyum Zonooz, Davide Curreli et al. · Surface and Coatings Technology · 2017 · 11 citations