Concepedia

Dren Qerimi

DQ

Statistics

Publications

3

Citations

37

H-Index

3

Active since

2020

Affiliations

University of Illinois Urbana-Champaign(Current)

Dren Qerimi is an author at University of Illinois Urbana-Champaign specializing in chemical engineering, applied physics, and engineering.

ORCID

Top concepts

Publications per year

2020–2022

3

Publications

3

Study of a linear surface wave plasma source for tin removal in an extreme ultraviolet source

Dren Qerimi, Gianluca Panici, Arihant Jain et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2020 · 15 citations · Full text

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Tin removal by an annular surface wave plasma antenna in an extreme ultraviolet lithography source

Dren Qerimi, Andrew C. Herschberg, Gianluca Panici et al. · Journal of Applied Physics · 2022 · 12 citations · Full text

, , +17

Radical probe system for <i>in situ</i> measurements of radical densities of hydrogen, oxygen, and nitrogen

Dren Qerimi, Ivan Shchelkanov, Gianluca Panici et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 10 citations

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