Concepedia

Yannick Vesters

YV

10

Publications

190

Citations

10

H-Index

2017

Active since

Affiliations

VIB-KU Leuven Center for Microbiology

Nano-C (United States)

University of Birmingham

Yannick Vesters is an author at IMEC specializing in engineering, applied physics, and optoelectronics.

Top concepts

EngineeringApplied PhysicsOptoelectronicsMaterial ScienceNanofabricationMicroelectronicsMicrofabricationPhysicsMicroscopyInstrumentation

Publications per year

2017–2019

10

Publications

10

Photoresists in extreme ultraviolet lithography (EUVL)

Danilo De Simone, Yannick Vesters, Geert Vandenberghe · Advanced Optical Technologies · 2017 · 45 citations

Materials Science, Optical Materials, Extreme Ultraviolet Lithography +15

EUV photoresist patterning characterization for imec N7/N5 technology

Danilo De Simone, Vito Rutigliani, Gian F. Lorusso et al. · 2018 · 23 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +21

Molecular Modeling of EUV Photoresist Revealing the Effect of Chain Conformation on Line-Edge Roughness Formation

Juhae Park, Sunggyu Lee, Yannick Vesters et al. · Polymers · 2019 · 23 citations · Full text

Exploring the readiness of EUV photo materials for patterning advanced technology nodes

Danilo De Simone, Yannick Vesters, Atif Shehzad et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 19 citations

Short Wavelength Optic, Optical Materials, Engineering +19

Unraveling the role of photons and electrons upon their chemical interaction with photoresist during EUV exposure

Yannick Vesters, Atish Rathore, Pieter Vanelderen et al. · 2018 · 18 citations · Full text

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