Concepedia

S. S. Kim

SS

Statistics

Publications

2

Citations

97

H-Index

2

Active since

1989

Affiliations

North Carolina State University(Current)

S. S. Kim is an author at North Carolina State University specializing in materials science, chemical vapor deposition, and thin films.

Publications per year

1989–1990

2

Publications

2

Atomic structure in SiO2 thin films deposited by remote plasma-enhanced chemical vapor deposition

G. Lucovsky, J. T. Fitch, D. V. Tsu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 59 citations

, , +17

Formation of device quality Si/SiO2 interfaces at low substrate temperatures by remote plasma enhanced chemical vapor deposition of SiO2

G. Lucovsky, S. S. Kim, J. T. Fitch · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 38 citations

, , +17

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