S.-Y. Lee

Controlling resist thickness and etch depth for fabrication of 3D structures in electron-beam grayscale lithography

J. Kim, David C. Joy, S.-Y. Lee · Microelectronic Engineering · 2007 · 79 citations

Engineering, Materials Engineering, Materials Science +15

Analysis of three-dimensional proximity effect in electron-beam lithography

S.-Y. Lee, Kasi Anbumony · Microelectronic Engineering · 2005 · 27 citations

Engineering, Electrical Engineering, Materials Science +12

Estimation of resist profile for line/space patterns using layer-based exposure modeling in electron-beam lithography

Qing Dai, S.-Y. Lee, S.-Y. Lee et al. · Microelectronic Engineering · 2010 · 19 citations

Engineering, Electrical Engineering, Materials Science +8

Experiment-based estimation of point spread function in electron-beam lithography: Forward-scattering part

Qing Dai, S.-Y. Lee, S.-Y. Lee et al. · Microelectronic Engineering · 2011 · 13 citations

Engineering, Electrical Engineering, Computational Electromagnetics +15