Qing Dai

New types of dose distributions for vertical sidewall minimizing total dose in 3-D electron-beam proximity effect correction of nanoscale features

Qing Dai, Soo-Young Lee, Sang-Hee Lee et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012 · 22 citations

Engineering, Materials Engineering, Materials Science +14

A fast path-based method for 3-D resist development simulation

Qing Dai, Rui Guo, Soo-Young Lee et al. · Microelectronic Engineering · 2014 · 22 citations

Engineering, Computational Engineering, Electrical Engineering +10

Estimation of resist profile for line/space patterns using layer-based exposure modeling in electron-beam lithography

Qing Dai, S.-Y. Lee, S.-Y. Lee et al. · Microelectronic Engineering · 2010 · 19 citations

Engineering, Electrical Engineering, Materials Science +8

Three-dimensional proximity effect correction for large-scale uniform patterns

Qing Dai, S.-Y. Lee, S.-H. Lee et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 17 citations

Engineering, Electrical Engineering, Electronic Materials +14

Experiment-based estimation of point spread function in electron-beam lithography: Forward-scattering part

Qing Dai, S.-Y. Lee, S.-Y. Lee et al. · Microelectronic Engineering · 2011 · 13 citations

Engineering, Electrical Engineering, Computational Electromagnetics +15