Statistics
Publications
1
Citations
17
H-Index
1
Active since
2011
Affiliations
Samsung (South Korea)(Current)
S.-Y. Lee is an author at Samsung (South Korea) specializing in resist patterning, geometric distortion correction, and three-dimensional dose distribution.
Publications per year
2011–2011
1
1
Three-dimensional proximity effect correction for large-scale uniform patterns
Qing Dai, S.-Y. Lee, S.-H. Lee et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 17 citations
Engineering, Electrical Engineering, Electronic Materials +14
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