Concepedia

Kasi Anbumony

KA

Statistics

Publications

3

Citations

76

H-Index

3

Active since

2005

Affiliations

Auburn University(Current)

Kasi Anbumony is an author at Auburn University specializing in electron beam lithography, engineering, and device simulation.

Publications per year

2005–2007

3

Publications

3

Accurate control of remaining resist depth for nanoscale three-dimensional structures in electron-beam grayscale lithography

Soo-Young Lee, Kasi Anbumony · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 31 citations

Engineering, Materials Science, Electronic Materials +12

Analysis of three-dimensional proximity effect in electron-beam lithography

S.-Y. Lee, Kasi Anbumony · Microelectronic Engineering · 2005 · 27 citations

Engineering, Electrical Engineering, Materials Science +12

True three-dimensional proximity effect correction in electron-beam lithography

Kasi Anbumony, Soo-Young Lee · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 18 citations

Engineering, Electrical Engineering, Electronic Materials +14

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