4
Publications
252
Citations
4
H-Index
2006
Active since
Affiliations
Françoise Kidwingira is an author at KLA (United States) specializing in applied physics, engineering, and electrical engineering.
Top concepts
EngineeringApplied PhysicsElectrical EngineeringMicrofabricationElectronic PackagingPhysicsMagnetismMicroscopyThin Films3D Printing
Publications per year
2006–2013
4
4
Reflective electron-beam lithography: progress toward high-throughput production capability
Regina Freed, Thomas Gubiotti, Jeff Sun et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 20 citations
Nm Half Pitch, Electrical Engineering, Wafer Scale Processing +13
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