Concepedia

E. Kobeda

EK

Statistics

Publications

6

Citations

524

H-Index

6

Active since

1986

Affiliations

University of North Carolina at Chapel Hill(Current)

North Carolina State University

E. Kobeda is an author at University of North Carolina at Chapel Hill specializing in engineering, thin films, and applied physics.

Top concepts

Publications per year

1986–1991

6

Publications

6

Effects of thermal history on stress-related properties of very thin films of thermally grown silicon dioxide

J. T. Fitch, G. Lucovsky, E. Kobeda et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 127 citations

, , +15

A measurement of intrinsic SiO2 film stress resulting from low temperature thermal oxidation of Si

E. Kobeda, E. A. Irene · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 110 citations

, , +14

Intrinsic SiO2 film stress measurements on thermally oxidized Si

E. Kobeda, E. A. Irene · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 110 citations

, , +11

SiO2 film stress distribution during thermal oxidation of Si

E. Kobeda, E. A. Irene · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 108 citations

, , +15

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> stress measurements during thermal oxidation of silicon

E. Kobeda, E. A. Irene · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 49 citations

, , +15

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