Concepedia

Ju Eun Kang

JE

Statistics

Publications

2

Citations

32

H-Index

2

Active since

2022

Affiliations

Myongji University(Current)

Ju Eun Kang is an author at Myongji University specializing in high-temperature plasmas, plasma-surface interactions, and electronic materials.

Publications per year

2022–2024

2

Publications

2

Spectroscopic Analysis of CF4/O2 Plasma Mixed with N2 for Si3N4 Dry Etching

Wan Soo Song, Ju Eun Kang, Sang Jeen Hong · Coatings · 2022 · 21 citations · Full text

, , +16

Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber

Surin An, Jeong Eun Choi, Ju Eun Kang et al. · IEEE Transactions on Semiconductor Manufacturing · 2024 · 11 citations

, , +14

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