Surin An

Surface Morphology and Defect Formation Mechanisms for HgCdTe (211)B Grown by Molecular Beam Epitaxy

Yong Chang, C. R. Becker, C. H. Grein et al. · Journal of Electronic Materials · 2008 · 33 citations

Engineering, Materials Engineering, Materials Science +17

Passivation of HgCdTe p-n diode junction by compositionally graded HgCdTe formed by annealing in a Cd/Hg atmosphere

Surin An, Jong‐Ho Kim, Dae-Won Seo et al. · Journal of Electronic Materials · 2002 · 25 citations

Engineering, Materials Engineering, Materials Science +14

Spectroscopic Analysis of NF3 Plasmas with Oxygen Additive for PECVD Chamber Cleaning

Surin An, Sang Jeen Hong · Coatings · 2023 · 19 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

An<i> in situ</i> monitoring method for PECVD process equipment condition

Gi‐Hwan Kang, Surin An, K Kim et al. · Plasma Science and Technology · 2018 · 16 citations

Engineering, Chemical Engineering, Equipment +7

Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber

Surin An, Jeong Eun Choi, Ju Eun Kang et al. · IEEE Transactions on Semiconductor Manufacturing · 2024 · 11 citations

Natural Sciences, Environmental Sciences, Materials Science +14