Jeong Eun Choi

Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment

Sun Ho Kim, Chan Young Kim, Da Hoon Seol et al. · IEEE Transactions on Semiconductor Manufacturing · 2022 · 43 citations

Computing, Computer Science, Manufacturing Engineering +17

Machine learning-based virtual metrology on film thickness in amorphous carbon layer deposition process

Jeong Eun Choi, Sang Jeen Hong · Measurement Sensors · 2021 · 35 citations · Full text

Natural Sciences, Manufacturing Engineering, Materials Science +15

Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment

Hyoeun Park, Jeong Eun Choi, Dohyun Kim et al. · Electronics · 2021 · 26 citations · Full text

Computing, Computer Science, Manufacturing Engineering +17

Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma

Jeong Eun Choi, Hyoeun Park, Yongho Lee et al. · IEEE Transactions on Semiconductor Manufacturing · 2021 · 26 citations

Engineering, Computer Science, Materials Engineering +17

Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data

Jeong Eun Choi, Da Hoon Seol, Chan Young Kim et al. · Sensors · 2023 · 22 citations · Full text

Computing, Computer Engineering, Computer Science +17