Sang Jeen Hong

Neural network modeling of reactive ion etching using optical emission spectroscopy data

Sang Jeen Hong, G.S. May, Dong-Cheol Park · IEEE Transactions on Semiconductor Manufacturing · 2003 · 91 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fault Detection and Classification in Plasma Etch Equipment for Semiconductor Manufacturing $e$-Diagnostics

Sang Jeen Hong, Woo Yup Lim, Taesu Cheong et al. · IEEE Transactions on Semiconductor Manufacturing · 2011 · 78 citations

Engineering, Computer Science, Manufacturing Engineering +17

Neural Network-Based Real-Time Malfunction Diagnosis of Reactive Ion Etching Using In Situ Metrology Data

Sang Jeen Hong, G.S. May · IEEE Transactions on Semiconductor Manufacturing · 2004 · 48 citations

Engineering, Computer Science, Manufacturing Engineering +17

Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment

Sun Ho Kim, Chan Young Kim, Da Hoon Seol et al. · IEEE Transactions on Semiconductor Manufacturing · 2022 · 43 citations

Computing, Computer Science, Manufacturing Engineering +17

Neural-Network-Based Sensor Fusion of Optical Emission and Mass Spectroscopy Data for Real-Time Fault Detection in Reactive Ion Etching

Sang Jeen Hong, G.S. May · IEEE Transactions on Industrial Electronics · 2005 · 40 citations

Computing, Materials Science, Machine Learning +16