Concepedia

Woo Yup Lim

WY

Statistics

Publications

1

Citations

72

H-Index

1

Active since

2011

Affiliations

Myongji University(Current)

Woo Yup Lim is an author at Myongji University specializing in systems engineering, electrical engineering, and manufacturing systems.

Top concepts

Publications per year

2011–2011

1

Publications

1

Fault Detection and Classification in Plasma Etch Equipment for Semiconductor Manufacturing $e$-Diagnostics

Sang Jeen Hong, Woo Yup Lim, Taesu Cheong et al. · IEEE Transactions on Semiconductor Manufacturing · 2011 · 72 citations

, , +19

Rows per page

1–1 of 1