M.R. Kump

Characterization of two-dimensional dopant profiles: Status and review

Alain C. Diebold, M.R. Kump, Joseph J. Kopanski et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 84 citations

Engineering, Electrical Engineering, Materials Science +17

Process design using two-dimensional process and device simulators

Daeje Chin, M.R. Kump, Hee‐Gook Lee et al. · IEEE Transactions on Electron Devices · 1982 · 45 citations

Engineering, Electrical Engineering, Microelectronics +16

The efficient simulation of coupled point defect and impurity diffusion

M.R. Kump, R.W. Dutton · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1988 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +15

Process design using coupled 2D process and device simulators

D.J. Chin, M.R. Kump, H.G. Lee et al. · 1980 · 10 citations

Engineering, Electrical Engineering, Microelectronics +16