Concepedia

Katsunori Ichiki

KI

Statistics

Publications

5

Citations

417

H-Index

5

Active since

1997

Affiliations

Ebara (Japan)(Current)

Tohoku University

Katsunori Ichiki is an author at Ebara (Japan) specializing in neutralization, radiation damage, and radiation physics.

Publications per year

1997–2004

5

Publications

5

Generating high-efficiency neutral beams by using negative ions in an inductively coupled plasma source

Seiji Samukawa, Keisuke Sakamoto, Katsunori Ichiki · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 170 citations

, , +13

High-Efficiency Neutral-Beam Generation by Combination of Inductively Coupled Plasma and Parallel Plate DC Bias

Seiji Samukawa, Keisuke Sakamoto, Katsunori Ichiki · Japanese Journal of Applied Physics · 2001 · 78 citations

, , +13

High-Efficiency Low Energy Neutral Beam Generation Using Negative Ions in Pulsed Plasma

Seiji Samukawa, Keisuke Sakamoto, Katsunori Ichiki · Japanese Journal of Applied Physics · 2001 · 75 citations

, , +14

50 nm gate electrode patterning using a neutral-beam etching system

Shuichi Noda, H. Nishimori, Tohru Ida et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 59 citations

, , +17

Fast Atom Beam Etching of Glass Materials with Contact and Non-Contact Masks

Yasushi TOMA, Masahiro Hatakeyama, Katsunori Ichiki et al. · Japanese Journal of Applied Physics · 1997 · 35 citations

, , +15

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