Mike Miller

Step and flash imprint lithography for manufacturing patterned media

Gerard M. Schmid, Mike Miller, Cynthia B. Brooks et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 49 citations

Materials Science, Media Hard Disks, Engineering +13

Fabrication of nanometer sized features on non-flat substrates using a nano-imprint lithography process

Mike Miller, Gary Doyle, Nick Stacey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 24 citations

Engineering, Pattern Transfer, Nano-imprint Lithography +18

High-performance wire-grid polarizers using jet and Flash™ imprint lithography

Se Hyun Ahn, Shuqiang Yang, Mike Miller et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 24 citations · Full text

Engineering, Electron-beam Lithography, Flash™ Imprint Lithography +16

Whole wafer imprint patterning using step and flash imprint lithography: a manufacturing solution for sub-100-nm patterning

David L. Lentz, Gary Doyle, Mike Miller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 16 citations

Engineering, Pattern Transfer, Micromanufacturing +20

Step and flash imprint lithography for manufacturing patterned media

Cynthia B. Brooks, Gerard M. Schmid, Mike Miller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 13 citations

Materials Science, Media Hard Disks, Engineering +14