Concepedia

Monique Ben-Dor

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Statistics

Publications

2

Citations

77

H-Index

2

Active since

1989

Affiliations

Lam Research (United States)(Current)

Monique Ben-Dor is an author at Lam Research (United States) specializing in materials science, etching, and plasma etching.

Publications per year

1989–1993

2

Publications

2

Transformer coupled plasma etch technology for the fabrication of subhalf micron structures

J. B. Carter, John Holland, Eric A. Peltzer et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 66 citations

, , +14

High-selectivity plasma etching of silicon dioxide on single-wafer etchers

Gerald Z. Yin, Monique Ben-Dor, Mark S. Chang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 11 citations

, , +17

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