Statistics
Publications
1
Citations
66
H-Index
1
Active since
1993
Affiliations
Lam Research (United States)(Current)
Eric A. Peltzer is an author at Lam Research (United States) specializing in microfabrication, microelectronics, and instrumentation.
Publications per year
1993–1993
1
1
Transformer coupled plasma etch technology for the fabrication of subhalf micron structures
J. B. Carter, John Holland, Eric A. Peltzer et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 66 citations
Materials Science, Electrical Engineering, Subhalf Micron Structures +14
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