Concepedia

Mark S. Chang

MS

Statistics

Publications

2

Citations

25

H-Index

2

Active since

1978

Affiliations

University of Pennsylvania(Current)

Mark S. Chang is an author at University of Pennsylvania specializing in materials engineering, materials science, and optics.

Publications per year

1978–1989

2

Publications

2

Diffraction efficiency of continuously etched gratings in As2S3 films

Mark S. Chang, T. W. Hou · Optics Communications · 1978 · 14 citations

, , +10

High-selectivity plasma etching of silicon dioxide on single-wafer etchers

Gerald Z. Yin, Monique Ben-Dor, Mark S. Chang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 11 citations

, , +17

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