Concepedia

T. Fujimaki

TF

4

Publications

94

Citations

4

H-Index

2003

Active since

Affiliations

Toshiba (Japan)(Current)

T. Fujimaki is an author at Toshiba (Japan) specializing in electronic packaging, electrical engineering, and materials engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectronic PackagingMaterials EngineeringElectrical EngineeringNanoelectronicsCorrosion3D Printing

Publications per year

2003–2024

4

Publications

4

Stress-induced voiding phenomena for an actual CMOS LSI interconnects

Kenji Yoshida, T. Fujimaki, Koji Miyamoto et al. · 2003 · 46 citations

Materials Engineering, Defect Tolerance, Electrical Engineering +14

A 45nm High Performance Bulk Logic Platform Technology (CMOS6) using Ultra High NA(1.07) Immersion Lithography with Hybrid Dual-Damascene Structure and Porous Low-k BEOL

H. Nii, T. Sanuki, Y. Okayama et al. · 2006 · 22 citations

Engineering, Ultra High Na, Wafer Scale Processing +16

Oxide-Semiconductor Channel Transistor DRAM (OCTRAM) with 4F2 Architecture

Shosuke Fujii, Keiji Ikeda, Kei Sakamoto et al. · 2024 · 16 citations

Copper Line Resistance Control and Reliability Improvement by Surface Nitridation of Ti barrier Metal

A. Sakata, Shuzo Kato, Yuuri Yano et al. · 2008 · 10 citations

Materials Engineering, Materials Science, Electrical Engineering +15

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