M. Gillinger

High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

Wenbo Wang, P. M. Mayrhofer, Xingli He et al. · Applied Physics Letters · 2014 · 121 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin films

M. Gillinger, Michael Schneider, Achim Bittner et al. · Journal of Applied Physics · 2015 · 42 citations

Materials Science, Aluminium Nitride, Electrical Engineering +14

Impact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based SAW devices on sapphire

M. Gillinger, Kirill Shaposhnikov, Theresia Knobloch et al. · Applied Physics Letters · 2016 · 31 citations

Aluminium Nitride, Engineering, Acoustic Metamaterial +22

Impact of sputter deposition parameters on the microstructural and piezoelectric properties of CrxAl1−xN thin films

E. Wistrela, I. Schmied, Michael Schneider et al. · Thin Solid Films · 2018 · 14 citations · Full text

Aluminium Nitride, Engineering, Piezoelectric Properties +17

Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications

M. Gillinger, Theresia Knobloch, A. Marković et al. · Materials Science in Semiconductor Processing · 2018 · 14 citations

Materials Science, Aluminium Nitride, Aln Passivation Layers +6