Statistics
Publications
2
Citations
37
H-Index
2
Active since
2003
Affiliations
University of Salford(Current)
M. Werner is an author at University of Salford specializing in implant materials, ion implantation effects, and semiconductor doping profiles.
Publications per year
2003–2006
2
2
Damage accumulation and dopant migration during shallow As and Sb implantation into Si
M. Werner, D.G. Armour, W VANDERVORST et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 21 citations · Full text
Engineering, Electrical Engineering, Materials Engineering +12
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